1. ashing - Noun
2. ashing - Verb
ashing (plural ashings)
(analytical chemistry) An analytic procedure in which a sample is heated in a furnace to leave a residue of ash, either to determine the gross mineral content, or as a preparation for further analysis
ashing
present participle of ash
In semiconductor manufacturing plasma ashing is the process of removing the photoresist (light sensitive coating) from an etched wafer. Source: Internet
High temperature ashing, or stripping, is performed to remove as much photo resist as possible, while the "descum" process is used to remove residual photo resist in trenches. Source: Internet
The main difference between the two processes is the temperature the wafer is exposed to while in an ashing chamber. Source: Internet
Two forms of plasma ashing are typically performed on wafers. Source: Internet