ashing
Speech parts
1. ashing - Noun
2. ashing - Verb
Meaning
ashing (plural ashings)
(analytical chemistry) An analytic procedure in which a sample is heated in a furnace to leave a residue of ash, either to determine the gross mineral content, or as a preparation for further analysis
ashing
present participle of ash
Synonyms
Anagrams
Examples
In semiconductor manufacturing plasma ashing is the process of removing the photoresist (light sensitive coating) from an etched wafer.
High temperature ashing, or stripping, is performed to remove as much photo resist as possible, while the "descum" process is used to remove residual photo resist in trenches.
The main difference between the two processes is the temperature the wafer is exposed to while in an ashing chamber.
Two forms of plasma ashing are typically performed on wafers.