ellipsometry

Noun

Meaning

ellipsometry (uncountable)

English Wikipedia has an article on:ellipsometryWikipedia
An optical technique for the investigation of the dielectric properties of thin films especially used in semiconductor manufacture.

Examples

Can we use white light source and perform wavelength-parallel measurement such as that in the state-of-art ellipsometry for the characterization of refractive index? Source: Internet

For example, thin film metrology based on ellipsometry or reflectometry is used to tightly control the thickness of gate oxide, as well as the thickness, refractive index and extinction coefficient of photoresist and other coatings. Source: Internet

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