Noun
excimer (plural excimers)
(chemistry, physics) Any diatomic exciplex
In particular, difference frequency mixing two photons of an ArF (193 nm) excimer laser with a tunable visible or near IR laser in hydrogen or krypton provides resonantly enhanced tunable VUV covering from 100 nm to 200 nm. Source: Internet
The EUV light is not emitted by the laser, but rather by electron transitions in an extremely hot tin or xenon plasma, which is excited by an excimer laser. Source: Internet
Experimental tools using the 157 nm wavelength from the F2 excimer laser in a manner similar to current exposure systems have been built. Source: Internet
Optical lithography has been extended to feature sizes below 50 nm using the 193 nm ArF excimer laser and liquid immersion techniques. Source: Internet
Since the mid-1990s Cymer Inc. has become the dominant supplier of excimer laser sources to the lithography equipment manufacturers, with Gigaphoton Inc. as their closest rival. Source: Internet
The current wavelength limit of production of coherent UV is about 126 nm, characteristic of the Ar 2 * excimer laser. Source: Internet