ion beam
Noun
Meaning
a beam of ions moving in the same direction at the same speed
Source: WordNetSynonyms
Hypernyms
Examples
Ion beam lithography It is known that focused- ion beam lithography has the capability of writing extremely fine lines (less than 50 nm line and space has been achieved) without proximity effect.
Ion beam milling may also be used for cross-section polishing prior to SEM analysis of materials that are difficult to prepare using mechanical polishing.