micromachining

Noun

Meaning

micromachining (plural micromachinings)

microfabrication

Examples

Analog Devices has pioneered the industrialization of surface micromachining and has realized the co-integration of MEMS and integrated circuits. Source: Internet

Bulk micromachining has been essential in enabling high performance pressure sensors and accelerometers that changed the sensor industry in the 1980s and 90's. Source: Internet

Integrated circuits are typically not combined with HAR silicon micromachining. Source: Internet

MEMS manufacturing technologies Bulk micromachining main Bulk micromachining is the oldest paradigm of silicon based MEMS. Source: Internet

The materials commonly used in HAR silicon micromachining are thick polycrystalline silicon, known as epi-poly, and bonded silicon-on-insulator (SOI) wafers although processes for bulk silicon wafer also have been created (SCREAM). Source: Internet

While it is common in surface micromachining to have structural layer thickness in the range of 2 µm, in HAR silicon micromachining the thickness can be from 10 to 100 µm. Source: Internet

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