Noun
micromachining (plural micromachinings)
microfabrication
Analog Devices has pioneered the industrialization of surface micromachining and has realized the co-integration of MEMS and integrated circuits. Source: Internet
Bulk micromachining has been essential in enabling high performance pressure sensors and accelerometers that changed the sensor industry in the 1980s and 90's. Source: Internet
Integrated circuits are typically not combined with HAR silicon micromachining. Source: Internet
MEMS manufacturing technologies Bulk micromachining main Bulk micromachining is the oldest paradigm of silicon based MEMS. Source: Internet
The materials commonly used in HAR silicon micromachining are thick polycrystalline silicon, known as epi-poly, and bonded silicon-on-insulator (SOI) wafers although processes for bulk silicon wafer also have been created (SCREAM). Source: Internet
While it is common in surface micromachining to have structural layer thickness in the range of 2 µm, in HAR silicon micromachining the thickness can be from 10 to 100 µm. Source: Internet