octafluorocyclobutane
Noun
Meaning
octafluorocyclobutane (uncountable)
The organofluorine compound C4F8, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.
Noun
octafluorocyclobutane (uncountable)
The organofluorine compound C4F8, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.