planarization
Noun
Meaning
planarization (plural planarizations)
The act or process of planarizing
Synonyms
Examples
As the number of interconnect levels increases, planarization of the previous layers is required to ensure a flat surface prior to subsequent lithography.
Materials demand is driven by substrates, making up over 70 percent of the market, packaging coatings and increasing use of chemical mechanical planarization (CMP).
Moore (2003) credits chemical mechanical planarization (chip smoothing) with increasing the connectivity of microprocessors from two or three metal layers in the early 1990s to seven in 2003.