Noun
planarization (plural planarizations)
The act or process of planarizing
As the number of interconnect levels increases, planarization of the previous layers is required to ensure a flat surface prior to subsequent lithography. Source: Internet
Materials demand is driven by substrates, making up over 70 percent of the market, packaging coatings and increasing use of chemical mechanical planarization (CMP). Source: Internet
Moore (2003) credits chemical mechanical planarization (chip smoothing) with increasing the connectivity of microprocessors from two or three metal layers in the early 1990s to seven in 2003. Source: Internet