Adjective
microelectromechanical (not comparable)
Describing any very small electromechanical system or device that is larger than a nanoelectromechanical one.
Already, such small devices, known as Microelectromechanical systems (MEMS), are used in automobiles to tell airbags when to deploy,sfn in digital projectors to create sharper images, and in inkjet printers to create nozzles for high definition printing. Source: Internet
Photolithography is also commonly used for fabricating Microelectromechanical systems (MEMS) devices. Source: Internet