Noun
microelectromechanical systems
plural of microelectromechanical system
microelectromechanical systems (uncountable)
the field of microelectromechanical systems
Already, such small devices, known as Microelectromechanical systems (MEMS), are used in automobiles to tell airbags when to deploy,sfn in digital projectors to create sharper images, and in inkjet printers to create nozzles for high definition printing. Source: Internet
Photolithography is also commonly used for fabricating Microelectromechanical systems (MEMS) devices. Source: Internet